VAMAS Surface Chemical Analysis Standard Data Transfer Format 1988 May 4
VG Scientific
EscaLab 220-IXL

A:\B_DIAM~1\C1S.DTS
0
NORM
REGULAR
1
0
0
0
0
0
1
Region 1
B-doped diamond
1998
11
26
15
6
42
255
0
XPS
Al K-alpha
1486.6
0
0
0
0
0
FAT
20
1E+37
4.295
0
0
0
0
0
C 1s
C 1s
-1
Kinetic Energy
eV
1146.6
0.1
1

Counts
pulse counting
0.1
10
0
0
0
0
0
601
3929.68
10199.3
3996.2
3993.9
4015.5
3980.4
3971.96
3969.98
3940.1
4075.9
3996
3935.8
3984.32
4011.74
4008.72
4072.78
4019
4056.82
3949.38
3939.98
4017.94
4059.02
3936.34
3929.68
4099.78
4048.62
4054.86
4014.96
4020.64
4064.22
4004.58
4047.16
4023.7
3984.08
4035.44
4040.62
4059.94
4104.62
3980.3
4152.84
4181.78
4165.7
4099.2
4108.92
4170.28
4164.06
4145.14
4037.72
4101.2
4194.1
4262.68
4161.56
4063.24
4096.86
4132.44
4127.76
4127.56
4097.34
4037.12
4037.34
4067.98
4107.88
4187.42
4160.22
4065.04
4144.96
4202.32
4121.56
4187.44
4109.06
4115.94
4108.86
4034.4
4100.52
4153.42
4214.06
4078.1
4137.22
4092.96
4098.36
4126.56
4085.36
4063.8
4081.96
3994.26
4030.32
4053.38
4075.48
4106.62
4079.34
4081
4120.52
4106.26
4156.02
4135.1
4109.16
4114.06
4029.74
4081.28
4108.36
4116.4
4134.4
4106.62
4062.48
4093.52
4199.48
4124.84
4133.44
4087.12
4108.54
4153.36
4038.56
4172.68
4109.16
4122.34
4124.48
4028.28
4177.72
4181.28
4167.3
4132.38
4125.9
4108.02
4137.5
4083.26
4146.24
4111.88
4145.26
4160.7
4119.92
4130.86
4075.04
4055.3
4102.42
4085.22
4057.1
4070.12
4054.78
4008.2
4061.2
4062.62
4062.76
4087.84
4101.34
4132.54
4154.2
4085.68
4211.2
4134.7
4118.14
4187.58
4100.16
4090.4
4174.64
4105.28
4065.52
4159.24
4146.32
4233.42
4135.34
4110.78
4112.18
4043.66
4079.74
4152.64
4200.22
4154.7
4123.64
4105.06
4159.02
4132.2
4147.58
4233.18
4321.02
4194.12
4154.04
4305.56
4236.98
4198.76
4211.94
4254.58
4177.1
4216.8
4242.58
4143
4199.58
4216.58
4253.78
4223.24
4235.46
4181.48
4232.76
4222.76
4246.68
4220.46
4268.2
4282.16
4268.56
4278.3
4260.84
4157.54
4245.88
4206.52
4227.54
4251.26
4287.54
4298.24
4296.84
4278.82
4233.96
4288.76
4306.62
4313
4240.9
4282.92
4313.32
4301.3
4320.16
4261.18
4220.96
4282.92
4238.04
4330.2
4286.3
4271.4
4281.24
4258.28
4355.62
4343.9
4267.68
4277.72
4290.98
4244.3
4262.66
4225.94
4338.4
4321.24
4343.26
4396.64
4345.06
4252.28
4378.06
4348.88
4356.08
4369.54
4317.8
4248.4
4295.28
4336.78
4286.86
4352.6
4292.92
4348.38
4348.7
4306.26
4313.88
4356.3
4427.16
4281.64
4258.18
4298.16
4383.88
4423.16
4279.3
4250.72
4379.52
4335.32
4308.36
4314.62
4275.64
4336.04
4362.52
4325.46
4264.22
4224.7
4360.04
4271.64
4252.5
4302.72
4334.52
4200.58
4256.28
4285.08
4309.24
4268.82
4304.76
4297.2
4289.96
4231.58
4314.7
4391.86
4319.62
4266.88
4257.32
4286.92
4312.24
4296.18
4252.92
4260.44
4218.5
4363.32
4303.22
4306.62
4349.94
4363.62
4315.56
4301.22
4288.78
4341.48
4332.6
4376.98
4341.52
4326.88
4272.88
4396.18
4341.26
4353.38
4377.2
4387.02
4301.6
4313.72
4387.5
4382.56
4258.38
4335.58
4417.56
4378.26
4368.46
4505.6
4397.72
4281.28
4268.58
4359.64
4420
4391.34
4417.82
4307.42
4344.76
4369.72
4385.52
4449.38
4390.82
4375.04
4429.66
4344.58
4402.2
4378.58
4440.34
4303.58
4403.82
4397.46
4276.3
4341.92
4383.26
4433.6
4312.8
4297.6
4262.02
4364.38
4287.08
4461.58
4352.52
4326.4
4324.88
4314.78
4338.5
4391.16
4352.9
4371.22
4307.4
4369.3
4406.32
4359.9
4391.84
4413.78
4347.08
4350.02
4397.44
4396.76
4354.82
4351.7
4343.2
4408
4351.94
4369.54
4439.46
4330.52
4291.68
4319.52
4287.76
4330.82
4359.7
4366.86
4379.96
4306.28
4351.2
4393.42
4360.26
4404.24
4446.14
4384.52
4486.2
4408.92
4352.36
4372.62
4483.7
4495.94
4338.38
4391.66
4374.74
4399.78
4308.72
4349.94
4454.24
4382.94
4421.68
4376.42
4415.14
4449.84
4311.84
4441.58
4413.54
4455.88
4438.34
4477
4445.94
4390.9
4468.94
4429.42
4426.3
4406.66
4510.52
4447.94
4410.4
4398.9
4385.6
4494.8
4378.9
4450.62
4421.58
4493.8
4443.96
4354.18
4378.46
4420.64
4433.18
4456.38
4445.68
4469.16
4399.98
4459.18
4315.06
4362.54
4412.4
4442.64
4373.18
4371.66
4319.24
4324.26
4315.12
4355.24
4386.92
4434.16
4371.02
4283.5
4421.46
4350.88
4283.26
4391.78
4480.64
4460.92
4409.4
4429.08
4389.14
4362.04
4398.46
4363.78
4366.74
4431.44
4452.5
4326.24
4307.64
4296.54
4410.7
4383.82
4346.92
4351.38
4313.68
4297.6
4368.64
4293.52
4346.28
4331.98
4283.42
4403.94
4320.78
4387.68
4323.96
4260.04
4297.12
4372.3
4384.7
4354.84
4395.42
4465.44
4359.06
4276.52
4358.58
4431.9
4422.52
4392
4452.04
4301.4
4313.86
4403.88
4415.22
4464.2
4427.4
4402.78
4346
4338.08
4325.72
4373.12
4297.16
4352.48
4383.9
4426.7
4400.16
4401.92
4447.96
4531.4
4456.36
4459.56
4561.42
4466.8
4420.76
4529.12
4418.62
4524.44
4503.38
4554.6
4461.38
4556.78
4531.5
4441.44
4485.28
4538.26
4470.3
4549.98
4493.12
4593.7
4728.12
4689.76
4845.1
4832.44
4985.22
5249.18
5393.12
5685.42
6016.68
6594.32
7190.98
8000.24
8789.7
9747.88
10170.6
10199.3
9668.66
8752.06
7500.34
6503.9
5750.44
5174.72
4921.12
4593.44
4566.32
4608.4
4559.22
4573.54
4457.2
4401
4433.24
4391.46
4358.8
4387.32
4465.9
4381.44
4406
4379.42
4408.18
4341.94
4290.8
4350.32
4380.98
4412.92
4318.32
4278.12
4304.48
4287.5
4348.38
4351.38
4366.94
4338.6
end of experiment
